myMaker - Events - Chinese Version
Search Product, Company or News
Home > Electronic, IT & Office Equipment > Electronic Manufacturing Machinery > Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5
Global Nanotech Equipment Co.
Company  |  Products  |  News  |  Contact Us
Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5
Dry Asher Etcher RIE ICP Equipment > Lam Research AutoEtch 590/490/690 Oxide Etcher

Manufacturer:Lam Research
Condition:Refurbished to OEM SPEC(Installation and warranty are optional)
Price:Contact Us Now
Location:California,USA
Amount: 4 sets
Description for reference only(One of the unit).
Wafer Size Capacity:4 to 6 inch
The system includes the following.
1. Send Indexer
2. Receive Indexer
3. Entrance Lifter
4. Exit Lifter
5. 4 Pin Lifter
6. Gap Assembly
7. Lower Match Assembly
8. Upper Electrode Assembly
9. Lower Electrode Assembly
10. 5 MFC Gas Box
11. Main Power Supply
12. Main Chamber Generator
13. 2 Recipe Modules, 2 Master Modules
14. Front & Rear EMO Switches
15. Panels & Plexi Glass Covers (Standalone System)
16. Main Chamber, Hex Plate, Orifice Ring, Pump Ring
17. 2 Channel Endpoint Detector
Please also refer to Lam Research 4520 Rainbow Oxide Etcher; Lam Research 4420 Rainbow Nitride Poly Etcher;Lam Research AutoEtch 490 Nitride Poly Etcher.

Related Products
Dry Asher Etcher RIE ICP Equip
Global Nanotech Equipment Co.
Dry Asher Etcher RIE ICP Equipment > Lam Research 4520/4420 Rainbow Oxide Etcher Manufacturer:Lam Research Condition:Refurbished to OEM SPEC (Installation ...
Wafer Probe EG 2001 wafer probe
Global Nanotech Equipment Co.
Wafer Probe > EG 2001 wafer probe Manufacturer:ELECTROGLAS Condition:Fully Refurbished in 4 to 6 weeks Price:Contact Us Amount in stock: 10 sets. ...
Dry Asher Etcher RIE ICP Equipment Tegal 901e /903e Plasma
Global Nanotech Equipment Co.
Dry Asher Etcher RIE ICP Equipment > Tegal 901e /903e Plasma Etcher Manufacturer:Tegal Condition:Refurbished to OEM SPEC (Installation and warranty ...
Wafer Probe EG 1034
Global Nanotech Equipment Co.
Wafer Probe > EG 1034 Manufacturer:ELECTROGLAS Condition:Fully Refurbished in 2 to 4 weeks by GNS Price:Contact Us Amount in stock: 20 sets. The ...
Metrology & Inspection KLA-Tencor Surfscan 6200
Global Nanotech Equipment Co.
Metrology & Inspection > KLA-Tencor Surfscan 6200 Manufacturer:KLA-Tencor Condition:Used,we sell it at AS IS(Refurbished and Installation are optional) ...

Electronic Manufacturing Machinery Exhibitions
ICMBE 2026
7/12/2026 - 7/16/2026
Detroit MI, United States
IVNC 2026
7/13/2026 - 7/17/2026
Tokyo, Japan
Semiconductor Asia Expo (SMAX) 2026
7/22/2026 - 7/24/2026
Penang, Malaysia
Electronics Manufacturing Expo Asia (EMAX) 2026
7/22/2026 - 7/24/2026
Penang, Malaysia
Fac Tec China 2026
Shanghai, China
More Trade Shows


About newMaker | Gold Suppliers | Contact Us | showsbee.com | showseye.com | newMaker China | My newMaker  
© newMaker.com. All Rights Reserved