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Global Nanotech Equipment Co. Company  |  Products  |  News  |  Contact Us Dry Asher Etcher RIE ICP Equip Dry Asher Etcher RIE ICP Equipment > Lam Research 4520/4420 Rainbow Oxide Etcher Manufacturer:Lam Research Condition:Refurbished to OEM SPEC (Installation and warranty are optional) Price:Contact Us Now Location:California,USA Amount: 6 sets Description for reference only(One of the unit). * Configured for 6" wafers * Classic control system * Bulkhead mount system * Momentary EMO * Hine 38A open cassette SEND indexer * Belt driven load station * Standard load station shuttle spatula * 6-gas box configuration * Standard gas box * Rear gas panel exhaust * [5Ra] gas weldment polish * Unit mass flow controllers Gas 1: Ar (1 slm) Gas 2: CF4 (50 sccm) Gas 3: CHF3 (50 sccm) Gas 4: He (1 slm) Gas 5: Ar (200 sccm) Gas 6: N2 (100 sccm) UPC: He (50 sccm) * AC input box (fuses) * 400 Khz RF power frequency * AE PDW-2200 RF generator on cart * 6" entrance loadlock wafer holder (Tight-pocket) * Variable upper chamber gap * LoFAT RF power tuning * Silicon upper chamber electrode * 6" lower chamber electrode (Non-ESC) * TAC for lower chamber wafer clamping * Single chamber monochromators * Non-heated endpoint window * Low pressure chamber manifolding * HPS valve for chamber isolation * AC-2 chamber pressure control * 10 Torr chamber manometer * 10 Torr wafer area pressure manometer * 100 Torr backside He manometer * 6" exit loadlock wafer holder * Hine 38A RECEIVE indexer * 3-light Light Tower Please also refer to Lam Research 4420 Rainbow Nitride Poly Etcher;Lam Research AutoEtch 590 Oxide Etcher;Lam Research AutoEtch 590 Oxide Etcher;Lam Research AutoEtch 490 Nitride Poly Etcher Related Products Wafer Probe EG 2001 wafer probe Global Nanotech Equipment Co. Wafer Probe > EG 2001 wafer probe Manufacturer:ELECTROGLAS Condition:Fully Refurbished in 4 to 6 weeks Price:Contact Us Amount in stock: 10 sets. ... Dry Asher Etcher RIE ICP Equipment Tegal 901e /903e Plasma Global Nanotech Equipment Co. Dry Asher Etcher RIE ICP Equipment > Tegal 901e /903e Plasma Etcher Manufacturer:Tegal Condition:Refurbished to OEM SPEC (Installation and warranty ... Wafer Probe EG 1034 Global Nanotech Equipment Co. Wafer Probe > EG 1034 Manufacturer:ELECTROGLAS Condition:Fully Refurbished in 2 to 4 weeks by GNS Price:Contact Us Amount in stock: 20 sets. The ... Metrology & Inspection KLA-Tencor Surfscan 6200 Global Nanotech Equipment Co. Metrology & Inspection > KLA-Tencor Surfscan 6200 Manufacturer:KLA-Tencor Condition:Used,we sell it at AS IS(Refurbished and Installation are optional) ... Metrology & Inspection Tencor Auto OmniMap RS55 / tc Global Nanotech Equipment Co. Metrology & Inspection > Tencor Auto OmniMap RS55 / tc Manufacturer:KLA-Tencor Condition:Used,we sell it at AS IS(Refurbished and Installation are optional) ...

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