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New Single Axis BAW MEMS Gyros with Superior Shock and Vibration Immunity Target Industrial Applications


MARLBOROUGH, Mass. - Qualtré, Inc introduced today the QGYR110Hx BAW MEMS gyroscopes, single-axis angular rate (rotational) sensors designed for harsh environments. Based on Qualtré's patented Bulk Acoustic Wave (BAW) MEMS technology, the new gyros are manufactured using a highly versatile and scalable High Aspect-Ratio Poly and Single--crystalline Silicon (HARPSS™) fabrication process, which allows an unprecedented combination of robustness, performance, and size advantages over conventional MEMS tuning-fork gyroscopes. QGYR110Hx samples, with analog or digital output, are now available in a small LGA32 package and are RoHS and green compliant.

"Our unique technology lets us offer the best-in-class 1-axis MEMS gyroscope at highly competitive price points compared to other 1-axis parts," said Dr. Sreeni Rao, Vice President of Vertical Markets, Qualtré, Inc. "The BAW MEMS structure has inherent advantages that enable linear acceleration sensitivity as low as 0.015 0/s/g and noise densities of 0.008 0/s/vHz. This advanced MEMS technology offers high shock and vibration immunity due to its rigid construction and high frequency operation. Together, these features allow us to address challenging requirements for higher performance combined with greater reliability, for industrial applications such as robotics, commercial and industrial drones (UAV's), platform stabilization, and heavy machinery, to name just a few. This single axis family nicely complements our QGYR330H three axis gyroscope products announced in June."

Key Features

Linear Acceleration Sensitivity: 0.015 0/s/g
Vibration Rectification: 0.00008 dps/g2
Noise Density: 0.008 0/s/vHz
Bias Instability: 14 0/Hr
Selectable Full Scale Range: ±200º/s, ±3000º/s
Offset Shift with Temperature: 0.04 0/s/0C

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